Transparent Quartz Crystal Boat Fused Silica Glass Reusable Wafer Diffusion Carrier
The quartz boat is a specialized glass vessel manufactured through vacuum melting and precision processing of high-purity silicon dioxide (SiO₂≥99.999%). With a softening point of 1730°C, long-term operational tolerance of 1100°C, and thermal stability of ±0.02mm/1000°C, it is engineered for extreme high-temperature environments such as semiconductor diffusion furnaces and photovoltaic coating equipment. Key advantages include:
① Exceptional Chemical Inertness: Resistant to strong acids (except HF) and molten alkalis, with acid resistance 30× that of ceramics and 150× stainless steel.
② Full-Spectrum Optical Clarity: >93% transmittance from UV to IR, ideal for laser cavities and optical sensors.
③ Superior Electrical Insulation: Resistivity up to 1×10¹⁸ Ω·cm, suitable for high-voltage applications.
Available in diameters ranging from 1.5 meters to 1mm, the product supports deep customization including non-standard grooves, gradient doping (e.g., radiation-resistant yttrium doping, ultra-thin walls of 0.1mm), and is widely used in semiconductor wafer growth, PV silicon diffusion, high-temperature lab reactions, and spacecraft thermal management systems.
Specification for quartz boats
| Chemical Composition: |
SiO₂ 99.9%; 99.98% |
| Density: |
2.2 (g/cm³) |
| Mohs Hardness: |
6.6 |
| Melting Point: |
1732 ℃ |
| Operating Temperature: |
1100 ℃ |
| Max Short-Term Temperature: |
1450 ℃ |
| Acid Resistance: |
30× ceramics / 150× stainless steel |
| Visible Light Transmittance: |
>93% |
| UV Transmittance: |
80% |
| Electrical Resistivity: |
10,000× conventional glass |
| Annealing Point: |
1215 ℃ |
| Softening Point: |
1730 ℃ |
Primary applications of quartz boats
1. Laboratory Research: High-temperature acid combustion, distilled water preparation, chemical reactions.
2. Semiconductor Manufacturing: Crucibles, boats, furnace tubes for wafer growth/doping/etching.
3. Optical Instruments: Rocket nozzles, spacecraft heat shields, observation windows.
4. Electric Light Sources: High-pressure mercury/xenon lamps, iodine-tungsten/infrared lamps.
5. Chemical/Metallurgical: Acid evaporation, cooling absorption, high-temperature storage.
Key advantages of quartz boats
1. High-Temperature Stability: Operates stably at 1100°C–1450°C (short-term tolerance to 1450°C).
2. Chemical Stability: 30× more resistant to acids/alkalis/salts than acid-proof ceramics.
3. Optical Transparency: >80% UV transmittance and high IR transmission.
4. Electrical Insulation: Resistivity 10,000× higher than conventional glass.
5. Low Thermal Expansion: Minimizes deformation risks, enhancing thermal shock resistance.
ZMSH's Services
- Custom Production: ODM/OEM services for size/shape/function customization.
- Processing: Grinding, cutting, polishing, annealing, drilling, welding.
- Technical Support: Design, R&D, and global after-sales.
- Quality Certifications: ISO9001, ROHS, CE, MSDS compliant.
- Logistics: Air/sea shipping with 3–15 day delivery, secure packaging, and breakage compensation.
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